SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope by which an X-ray analysis of a thin film testpiece can be accurately performed.

SOLUTION: In the scanning electron microscope, a characteristic X-ray 9 generated in the testpiece when an electron beam 3 from an electron beam source 1 is irradiated to the testpiece 5 is detected by an X-ray detector 8. The X-ray detector is disposed at a lower face side of the testpiece 5 to detect the characteristic X-ray 9 emitted from the lower face side of the testpiece 5.

COPYRIGHT: (C)2003,JPO