| 摘要 |
PROBLEM TO BE SOLVED: To provide a voltage measuring method which can effectively prevent the deterioration of a measurement accuracy when it is applied to a case where e.g. the ON-resistance of a photo-MOS relay is measured by an IC tester and when a voltage is measured, by driving a current in a state that an object to be inspected is driven by a drive source in the IC tester. SOLUTION: In a state that one end of a driving terminal of an object to be inspected 7 is maintained at a definite voltage by a constant voltage source 4A, and that the other end of the driving terminal is connected to the drive source 4C, a constant current 4B is connected to a measuring terminal, and the terminal voltage is measured. COPYRIGHT: (C)2003,JPO
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