| 摘要 |
A ceramic heater comprising a resistance heating element provided inside a ceramic substrate, characterized in that the resistance heating element consists of conductive ceramics, and a sintering assistant−containing layer exists on at least the surface of the resistance heating element. This heater is free from cracks even when a rapid temperature rise is involved, effective in making heating uniform and accelerating a temperature rise rate, and used in industrial fields such as semiconductor production testing devices and optical devices that include electrostatic chucks and plasma generators.
|
