发明名称 Heated pressure transducer assembly
摘要 A pressure transducer assembly comprising: (A) an enclosure defining an interior cavity; (B) a pressure sensor, disposed in one portion of said interior cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port; (C) a control unit, disposed in another portion of said interior cavity, including signal conditioning means for sensing the parameter value and for generating in response thereto an output signal representative of the pressure at said input port and said control unit including first controller means for controlling the temperature of said sensor at a first preselected temperature, and said control unit including second controller means for controlling the temperature of said control unit at a second preselected temperature different from the first preselected temperature. <IMAGE>
申请公布号 EP1316785(A2) 申请公布日期 2003.06.04
申请号 EP20020079663 申请日期 1997.01.13
申请人 MKS INSTRUMENTS, INC. 发明人 PANDORF, ROBERT C.;DEMONE, ARCHIBALD J.;THOMAS, FRANK W.;BLANKENSHIP, STEVEN D.
分类号 G01L9/12;G01L7/00;G01L9/00;G01L19/00;G01L19/04;G01L19/14;(IPC1-7):G01L7/00 主分类号 G01L9/12
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