| 摘要 |
PURPOSE:To provide the method for formation of the fine structural body including grooves having inclined side faces, such as V-grooves. CONSTITUTION:A substrate 1 formed with a resist layer 2 is made inclined at a certain angle in a certain direction and this resist layer 2 is selectively subjected to first exposing by using synchrotron radiation light by using a mask 4. The substrate 1 having the resist layer 2 subjected to the first exposing is then made inclined at a certain angle in another direction of a direction reverse to the certain direction and is selectively subjected to second exposing by using the synchrotron radiation light by using the mask 4. The resist layer 2 is then developed to form resist patterns having the V-grooves. A metal casting mold is formed by using these patterns and the fine structural body having the V-grooves is formed by using this metal casting mold. |
