发明名称 Robot for handling workpieces in an automated processing system
摘要 An automated workpiece processing system has a transfer robot including an end effector having arms which move linearly towards each other to pick up a workpiece. Each arm has two workpiece contactors for engaging the edges of the workpiece. The contactors are positioned equally distant from the workpiece edges. The arms are moved linearly together, while they remain parallel to each other. The contactors contact the edges of the workpiece without causing sliding or displacement of the workpiece. Transfer robot movement or pre-positioning of the end effector is minimized, expediting handling of workpieces within the automated system.
申请公布号 US6572320(B2) 申请公布日期 2003.06.03
申请号 US20010907523 申请日期 2001.07.16
申请人 SEMITOOL, INC. 发明人 DAVIS JEFFRY
分类号 H01L21/677;H01L21/687;(IPC1-7):B25J15/08 主分类号 H01L21/677
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