| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thin and light ceramic substrate for semiconductor production/inspection system in which the function of a conductor, e.g. the temperature in case of a heating element, can be reflected quickly on the action, e.g. the temperature, of the working surface of the substrate. SOLUTION: A planar or flat conductor is arranged in an insulating ceramic substrate comprising nitride ceramic or carbide ceramic. The conductor is arranged eccentrically from the substrate in the thickness direction and the surface remote from the conductor serves as a working surface (heating surface).</p> |
