发明名称 |
A DEVICE FOR PROCESSING A THREE DIMENSIONAL STRUCTURE INTO A SUBSTRATE |
摘要 |
A device and a method for processing a substrate, wherein a flexible force absorbing means is provide in at least a part of a tool plan and/or a reaction plan, so as to locally absorbing the forces applied by the planes. The flexible force absorbing mean having spring-like properties such that it is adapted to be elastically deformed when the tool plan and the reaction plan are pressed against each other. |
申请公布号 |
WO03043801(A1) |
申请公布日期 |
2003.05.30 |
申请号 |
WO2002DK00787 |
申请日期 |
2002.11.22 |
申请人 |
GLUD & MARSTRAND A/S;TIDEMANN, JESPER;ZUBCEVIC, ESAD |
发明人 |
TIDEMANN, JESPER;ZUBCEVIC, ESAD |
分类号 |
B81C99/00;B29C59/00;B29C59/02;B29C59/04;B29L7/00;B29L31/34;B44B5/00;B44B5/02 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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