| 发明名称 |
NOVEL ESTER COMPOUNDS |
| 摘要 |
Acrylic esters containing fluorine at alpha-position and having an alkoxymethyl group introduced into the ester side chain thereof are novel. Polymers obtained from the acrylic esters are improved in transparency, acid elimination and substrate adhesion and are used to formulate chemically amplified resist compositions for lithographic microfabrication.
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| 申请公布号 |
US2003100791(A1) |
申请公布日期 |
2003.05.29 |
| 申请号 |
US20020305085 |
申请日期 |
2002.11.27 |
| 申请人 |
HARADA YUJI;HATAKEYAMA JUN;KAWAI YOSHIO;SASAGO MASARU;ENDO MASAYUKI;KISHIMURA SHINJI;MAEDA KAZUHIKO;OOTANI MICHITAKA;KOMORIYA HARUHIKO |
发明人 |
HARADA YUJI;HATAKEYAMA JUN;KAWAI YOSHIO;SASAGO MASARU;ENDO MASAYUKI;KISHIMURA SHINJI;MAEDA KAZUHIKO;OOTANI MICHITAKA;KOMORIYA HARUHIKO |
| 分类号 |
C07C69/54;C07C67/10;C07C69/653;C07C69/734;C08F20/28;G03F7/039;(IPC1-7):C07C69/74;C07C69/73;C07C69/66;C07C69/62 |
主分类号 |
C07C69/54 |
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