COMPOSITION FOR THE CHEMICAL-MECHANICAL POLISHING OF METAL AND METAL/DIELECTRIC STRUCTURES WITH HIGH SELECTIVITY,申请号IL20020152454-传众专利搜索

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发明名称	COMPOSITION FOR THE CHEMICAL-MECHANICAL POLISHING OF METAL AND METAL/DIELECTRIC STRUCTURES WITH HIGH SELECTIVITY
摘要
申请公布号	IL152454(D0)	申请公布日期	2003.05.29
申请号	IL20020152454	申请日期	2002.10.24
申请人	BAYER AKTIENGESELLSCHAFT	发明人
分类号	B24B37/00;C09G1/02;C09K3/14;H01L21/304;H01L21/321;(IPC1-7):C09G	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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