发明名称 ACTIVE TEMPERATURE GRADIENT REDUCER
摘要 An apparatus and method for actively reducing the temperature gradient of a substrate. The substrate is placed in thermal contact with a heat dissipation structure so as to dissipate heat from the substrate. Current is passed through a thermoelectric device, so as to provide cooling to at least one hot spot on the substrate.
申请公布号 US2003097846(A1) 申请公布日期 2003.05.29
申请号 US20010995347 申请日期 2001.11.27
申请人 NOVOTNY SHLOMO;DUNN JOHN;VOGEL MARLIN 发明人 NOVOTNY SHLOMO;DUNN JOHN;VOGEL MARLIN
分类号 F25B21/02;H01L23/38;H01L35/30;(IPC1-7):F25B21/02 主分类号 F25B21/02
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