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发明名称
Vorrichtung und Verfahren zur Wärmebehandlung von Substraten
摘要
申请公布号
DE19907497(C2)
申请公布日期
2003.05.28
申请号
DE19991007497
申请日期
1999.02.22
申请人
STEAG HAMATECH AG
发明人
SZEKERESCH, JAKOB;DIETZE, UWE;DRES, PETER;WEIHING, ROBERT
分类号
H01L21/00;(IPC1-7):H01L21/324;H05B1/02;G05D23/00;H05B3/20
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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