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发明名称
Verfahren und Vorrichtung zum Charakterisieren einer Genauigkeitseigenschaft einer optischen Linse
摘要
申请公布号
DE3732149(C2)
申请公布日期
2003.05.28
申请号
DE19873732149
申请日期
1987.09.24
申请人
APPLIED MATERIALS, INC.
发明人
BORODOVSKY, YAN
分类号
G01M11/02;G03F7/20;(IPC1-7):G01M11/02;G02B26/10
主分类号
G01M11/02
代理机构
代理人
主权项
地址
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