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经营范围
发明名称
CVD COATING DEVICE
摘要
申请公布号
EP1313891(A1)
申请公布日期
2003.05.28
申请号
EP20010971962
申请日期
2001.08.24
申请人
AIXTRON AG
发明人
JUERGENSEN, HOLGER;KAEPPELER, JOHANNES;STRAUCH, GERD
分类号
C23C16/458;C30B25/12;H01L21/205;(IPC1-7):C23C16/458
主分类号
C23C16/458
代理机构
代理人
主权项
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