发明名称 APPARATUS FOR CONTROLLING RAW MATERIALS OF MODIFIED CHEMICAL VAPOR DEPOSITION
摘要 PURPOSE: An apparatus for controlling raw materials in the manufacture of optical fiber preforms by modified chemical vapor deposition(MCVD) is provided to automatically supply raw materials for continuous processing and improve the quality of optical fiber preforms. CONSTITUTION: The control apparatus of raw materials is characterized by comprising the parts of: a bubbler(21) for changing the state of raw materials(SiCl4, GeCl4) from liquid to vapor; a raw material tank(23) for feeding liquid raw materials to the bubbler; a regulator(25) set between bubbler and tank, for controlling the flux of raw materials fed into the bubbler; a radiation source(31), vertically set on one side outside the bubbler; a radiation sensor(33), vertically set on the other side outside the bubbler, for detecting radial rays transmitted through the bubbler as a signal and measuring a level of raw materials; a controller(40) for measuring the amount of raw materials remained in the bubbler through the radiation signal, calculating the amount of raw materials to be fed into the bubbler and generating a signal controlling the regulator.
申请公布号 KR20030041648(A) 申请公布日期 2003.05.27
申请号 KR20010072569 申请日期 2001.11.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SANG YUN
分类号 C03B37/018;(IPC1-7):C03B37/018 主分类号 C03B37/018
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