ANTENNA ELECTRODE OF ICP GENERATION APPARATUS

摘要

PURPOSE: An antenna electrode of an ICP(Inductively Coupled Plasma) generation apparatus is provided to prevent the corrosion from a surface of the antenna electrode by using an insulating coating layer. CONSTITUTION: An antenna electrode is formed by coating a silver coating layer(110) on a surface of a copper tube(100). An insulating coating layer(120) is formed on a surface of the silver coating layer. The insulating coating layer has the thickness of 1 to 500 micrometer. The insulating coating layer is formed on an inner surface of the copper tube in order to prevent the oxidation and the corrosion of the copper tube. The insulating coating layer is formed by coating teflon or ceramic.