| 摘要 |
PROBLEM TO BE SOLVED: To safely and surely transfer a substrate between a carriage and the other members without damaging the glass substrate. SOLUTION: This substrate transfer mechanism comprises a plurality of columns 7 diagonally supporting the substrate G on the carriage, downward recessed surface supporting claws fitted to the columns 7 and allowing the upper side edge part of the substrate G to be inserted therein, a plurality of upward recessed surface supporting claw 20 supporting the substrate G so as to raise from the underside, an opening drive mechanism installed on the lower side of a conveying route for traveling the carriage thereon and having a first push-up rod pushed up from the underside to the upper side of the carriage, a close drive mechanism having a second push-up rod, link mechanisms 10 fitted to the columns 7 and movably supporting the support claws 20 so as to be displaced in a state that an attitude making the recessed surface part upward is maintained, and an open/close drive force transmission shaft 75 installed on the carriage and transmitting the drive force of the open drive mechanism and close drive mechanism to the link mechanism 10. |
