| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrapure water distribution pipe for a clean room which is free from an eluted substance in ultrapure water to be distributed while having the smoothness of a pipe inner surface necessary to a piping material for ultrapure water and can maintain the cleanness of surroundings when connected to apparatuses installed in the clean room. SOLUTION: In the ultrapure water distribution resin pipe for the clean room, the surface roughness Ry of the inner surface of the pipe is 1μm or below, and an electrification preventing layer containing conductive fine particles is formed on the outer surface of the pipe.</p> |
