SINGLE/MULTI CANTILEVER PROBE HAVING HIGH RESOLUTION USED IN ATOMIC FORCE MICROSCOPY AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: An FET-tip type single/multi cantilever probe and a method for fabricating the same are provided to store and read an electric charge with high-speed, high-precision and high resolution by installing a tip in an FET channel formed on a front end of a cantilever arm. CONSTITUTION: A single FET-tip cantilever probe(100) includes a p-type single crystal silicon-on-insulator substrate(101). A silicon oxide layer(201) and an upper silicon layer(102) are sequentially deposited on the p-type single crystal silicon-on-insulator substrate(101). A cantilever arm(408) is formed by patterning the upper silicon layer(102) extending from a probe body(108) of the single FET-tip cantilever probe(100). A p-type tip(406) is formed in a front end of the cantilever arm(408). The p-type tip(406) is positioned at a center of a channel forming area(503), thereby forming an FET channel having n++-pn++ type structure.