ELECTRON ENERGY LOSS SPECTROSCOPE, ELECTRON MICROSCOPE EQUIPPED THEREWITH, AND ELECTRON ENERGY LOSS SPECTRUM MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide accurate and reliable electron energy loss spectrum measuring device capable of measuring electron energy loss spectrum and THEM or STEM provided with the same. SOLUTION: A peak of spectrum is detected by an electron beam detector, a gap amount of the peak position from a reference position on the electron beam detector is detected, and the gap amount is corrected by using a control device controlling an electron beam position on the electron beam detector. Electron energy loss spectrum is measured while controlling the correction of a gap amount between an electron beam position on a sample and a peak position of a spectrum and spectrum measurement by the electron beam detector. An accurate electron energy loss spectrum is acquired with an electron microscope provided with the electron energy loss spectroscope.