| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a highly reliable thin-wall ceramic diaphragm structure in which recesses, cracks, etc., do not occur in a diaphragm portion and which has a high natural resonance frequency, is excellent in strength, and does not hinder sintering at the time of sintering various kinds of films formed on its surface, and to provide a method by which the structure can be manufactured profitably. SOLUTION: The ceramic diaphragm structure is an integrally fired product composed of a ceramic substrate having at least one window section and a thin ceramic diaphragm plate laminated upon the substrate so as to cover the window section. In addition, a thin-wall diaphragm section is integrally formed with ceramic substrate at the window section. The diaphragm section is formed so that the section may be protruded outward in the direction opposite to the window section. In addition, the diaphragm section is protruded outward in the direction opposite to the window section at firing time when the ceramic diaphragm structure is manufactured.</p> |
