| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element in which an electrode excellent in power resistivity is formed on a piezoelectric substrate made of a single crystal of LiNbO3 or LiTaO3 . SOLUTION: After a deformed layer on the surface of a piezoelectric substrate 2 made of a single crystal LiNbO3 or LiTaO3 is removed, a base electrode layer 5 containing at least one of Ti, Cr and Ni as a main component is formed so as to have a thickness of 1-100 nm, and an Al electrode layer 4 which contains an Al as a main component and is doped with at least one selected from Cu, Ti, Mg, Ni, Mo and Sc at a concentration of 10 wt.%. The layer 4 has a twin-crystal structure and has a crystal azimuth oriented in a prescribed direction so that the direction of a normal of the Al crystal (111) substantially coincides with the Z axis of the crystal of the substrate 2.
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