| 摘要 |
PROBLEM TO BE SOLVED: To significantly improve the efficiency of frequency adjusting work of a piezoelectric resonator to improve the operational efficiency. SOLUTION: A window is provided on a partition wall of a vacuum chamber and the window is sealed with a piezoelectric resonation device. A resonation piece of the device is made to face a frequency adjusting source arranged in the chamber, and the terminal electrode of the device is arranged at the atmospheric side. Since frequency adjusting is performed for the piece placed in the chamber while measuring frequency at the atmospheric side, the operational efficiency can be significantly improved.
|
