发明名称 |
WAFER LEVEL CHIP SCALE PACKAGE HAVING STUD BUMP AND FABRICATING METHOD THEREOF |
摘要 |
PURPOSE: A wafer level chip package having a stud bump and a fabricating method thereof are provided to prevent a crack due to the stress by removing a slope portion from a redistribution line pattern formed on a layer between a solder bump and a chip pad. CONSTITUTION: A passivation layer(110) and a chip pad(115) are formed on a silicon substrate(100). A stud bump(125') is formed on the chip pad of the silicon substrate. The stud bump is surround by the first insulating layer(135'). A redistribution line pattern(140) is formed on the same horizontal plane of the first insulating layer and the stud bump in order to connect the stud bump with a solder bump(160). The second insulating layer(150) is used for insulating the redistribution line pattern. The solder bump is formed on the exposed redistribution line pattern. |
申请公布号 |
KR20030040644(A) |
申请公布日期 |
2003.05.23 |
申请号 |
KR20010071043 |
申请日期 |
2001.11.15 |
申请人 |
FAIRCHILD KOREA SEMICONDUCTOR LTD. |
发明人 |
CHOI, YUN HWA;LEE, SANG DO |
分类号 |
H01L21/60;H01L23/31;H01L23/485 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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