发明名称 WAFER LEVEL CHIP SCALE PACKAGE HAVING STUD BUMP AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A wafer level chip package having a stud bump and a fabricating method thereof are provided to prevent a crack due to the stress by removing a slope portion from a redistribution line pattern formed on a layer between a solder bump and a chip pad. CONSTITUTION: A passivation layer(110) and a chip pad(115) are formed on a silicon substrate(100). A stud bump(125') is formed on the chip pad of the silicon substrate. The stud bump is surround by the first insulating layer(135'). A redistribution line pattern(140) is formed on the same horizontal plane of the first insulating layer and the stud bump in order to connect the stud bump with a solder bump(160). The second insulating layer(150) is used for insulating the redistribution line pattern. The solder bump is formed on the exposed redistribution line pattern.
申请公布号 KR20030040644(A) 申请公布日期 2003.05.23
申请号 KR20010071043 申请日期 2001.11.15
申请人 FAIRCHILD KOREA SEMICONDUCTOR LTD. 发明人 CHOI, YUN HWA;LEE, SANG DO
分类号 H01L21/60;H01L23/31;H01L23/485 主分类号 H01L21/60
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