PROCESS AND APPARATUS FOR SILICON BOAT, SILICON TUBING AND OTHER SILICON BASED MEMBER FABRICATION

摘要

Process, apparatus and application of silicon/silicon alloy/silicon compound 10 comprising at least one silicon atom boat, silicon/silicon alloy/silicon compound 10 comprising at least one silicon atom made epitaxial chamber and various silicon/silicon alloy/silicon compound comprising at least one silicon atom made tubing and liners is described here. Powder pressing 12-16, plasma and non plasma powder deposition, slurry deposition and slurry casting, silicon/silicon alloy casting and directional solidification are among few methods described here. Silicon/silicon alloy 10 made articles and some of their applications in the wafer processing industry is also described.