发明名称 Heterobipolar transistor with T-shaped emitter terminal contact and method of manufacturing it
摘要 During production, an emitter opening is formed in an insulating layer deposited on successive layers of the transistor. The emitter contact is configured in the opening, covering the edge of the opening in a defined manner. A mesa structure is subsequently etched using the emitter contact as an etching mask. The remaining electrically insulating area acts as an aperture for electric current that is limited to a central region of the emitter layer and an emitter contact layer.
申请公布号 US2003096444(A1) 申请公布日期 2003.05.22
申请号 US20020253450 申请日期 2002.09.24
申请人 KRAUS STEFAN 发明人 KRAUS STEFAN
分类号 H01L21/331;H01L29/417;H01L29/737;(IPC1-7):H01L21/00 主分类号 H01L21/331
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