Stationary and pivotable trays for semiconductor wafer transfer

摘要

Stationary and pivotable trays for semiconductor wafer transfer are disclosed. A first moving equipment is movable to move a container for holding one or more semiconductor wafers from a wafer loading and unloading position to a wafer tank immersion position. A second moving equipment is movable to move the container from the wafer loading and unloading position to a container loading and unloading position. A stationary tray is located under the wafer loading and unloading position to collect liquid dripping from the first moving equipment. A pivotable tray is located to one side of the stationary tray, to collect the liquid dripping from the first moving equipment when this equipment is moving to the wafer loading and unloading position, such that the pivotable tray is lowered. The pivotable tray is raised when the second moving equipment is moving to the wafer loading and unloading position.