ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide an aligner using a honeycomb-shaped optical device and made excellent in terms of the dispersion of illuminance distribution. SOLUTION: This aligner employs a light collimation control part obtained by arranging light-transmitting hole parts in a honeycomb shape in order to obtain collimated beams by cutting non-collimated beams, and substance to be irradiated is irradiated with the light emitted from a light source and passing through the hole parts so that exposure is performed with the collimated beams. The aligner has a light collimation control part driving part for moving or vibrating the hole of the light collimation control part in a direction orthogonal to a light passing direction. The exposure is performed while moving or vibrating the hole of the light collimation control part in the direction orthogonal to the light passing direction by the light collimation control part driving part.