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发明名称
SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION
摘要
申请公布号
EP1311893(A2)
申请公布日期
2003.05.21
申请号
EP20010966701
申请日期
2001.08.17
申请人
THERMA-WAVE, INC.
发明人
NORTON, ADAM, E.;JOHNSON, KENNETH, C.;STANKE, FRED, E.
分类号
G01J3/02;G01J3/28;G01N21/27;G01N21/31;G01N21/47;G01N21/956;G02B5/30;G02B21/36;G02B27/28;(IPC1-7):G02B21/06
主分类号
G01J3/02
代理机构
代理人
主权项
地址
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