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发明名称
Vaporisation device
摘要
申请公布号
GB2342929(B)
申请公布日期
2003.05.21
申请号
GB19990024608
申请日期
1999.10.18
申请人
* LEYBOLD SYSTEMS GMBH;* BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG;* UNAXIS DEUTSCHLAND HOLDING GMBH;* APPLIED FILMS GMBH & CO.KG
发明人
THOMAS * VOGT;GUENTER * KLEMM;KLAUS * OBERLE;JUERGEN * KRISCHER
分类号
C23C14/04;C23C14/24;C23C14/56;(IPC1-7):C23C14/54
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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