发明名称 Magnetic head manufacturing method
摘要 A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the upper write pole, comprising: a first step of making the magnetic gap on the projection of the lower write pole; a second step of making a non-magnetic material layer on the lower write pole, the non-magnetic material layer having a projection on its top surface in positional alignment with the projection of the lower write pole; a third step of making a mask layer on the non-magnetic material layer, the mask layer having an opening in which the top surface of the projection of the non-magnetic material layer is exposed; a fourth step of making a curved recess in the non-magnetic material layer by isotropically etching the non-magnetic material layer through the opening of the mask layer; a fifth step of making an approximately tapered recess down from the bottom of the curved recess by anisotropically etching the non-magnetic material layer through the opening of the mask layer; and a sixth step of making the upper write pole by burying a magnetic material in the tapered recess and the curved recess is provided.
申请公布号 US6564445(B1) 申请公布日期 2003.05.20
申请号 US20000536743 申请日期 2000.03.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HASHIMOTO SUSUMU;HARA MICHIKO;NAGATA TOMOHIKO;TATEYAMA KOHICHI;YOSHIKAWA MASATOSHI;SAKAKUBO TAKEO;YODA HIROAKI;HORI AKIO;KOIZUMI TAKASHI
分类号 G11B5/31;G11B5/39;(IPC1-7):G11B5/127 主分类号 G11B5/31
代理机构 代理人
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