发明名称 AIR CLEANING DEVICE, AIR CLEANING METHOD AND WATER PURIFIER FOR AIR CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an air cleaning device which has a low running cost, and a method therefor. SOLUTION: The air cleaning device is an air-washer type which allows discharged air of a clean room to contact with injection water and cleans the same. Therein, the recovered water which is condensed after contacting the outside air or the discharged air is treated with an ion exchange resin comprising a cation exchange resin packed with a strong acid cation exchange resin and a weak base anion exchange resin, cations and anions other than IC (inorganic carbonic acid) among impurities contained in air are removed and the recovered water is used repeatedly as the injection water.
申请公布号 JP2003144828(A) 申请公布日期 2003.05.20
申请号 JP20010348493 申请日期 2001.11.14
申请人 NOMURA MICRO SCI CO LTD 发明人 YANAGI MOTONORI;SHIMIZU SHIGEMI;HIROSE TAKAZO;HIRANO MAKOTO
分类号 F24F7/00;B01D47/06;B01D53/14;B01D53/18;C02F1/42;F24F7/06 主分类号 F24F7/00
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