| 摘要 |
To reduce the field intensity on the termination surface, almost not affecting the on-characteristic, a drift layer is made of two layers, an n-layer and n- layer, and a termination region is formed on the surface of the above n- layer. An impurity concentration ratio between the n- layer and the n-layer is less than 1:2, and the thickness of the n- layer is less than that of a source n+ layer. Reliability can be secured even in a high temperature operation.
|
