| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar battery capable of manufacturing an (i) type fine crystal silicon layer or poly-crystal silicon layer having a (110) high orientation rate in a much lower temperature at low costs. SOLUTION: A first transparent electrode, a fine crystal Si layer or poly- crystal Si layer having pin structure or nip structure, a second transparent electrode, and a back electrode are successively formed on a transparent insulating substrate, so that a solar battery for making a light incident from the transparent insulating substrate side can be manufactured. In this case, at least the (i) type fine crystal Si layer or poly-crystal Si layer are heated by making the supporting electrode of a CVD device support an object to be treated having the transparent insulating substrate, and the mixed gas of chlorinated silicon group compound gas and H2 is supplied as raw material gas from a gas supply means to a reaction container, and a power for generating glow discharge whose frequency is 60 MHz or more is supplied from a power source to a ladder-type electrode so that glow discharge can be generated in the reaction container, and that plasma can be generated.</p> |
