SUBSTRATE CARRIER AND ITS ARM

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrier applicable readily even to an existing carrier provided only with a single arm in which the peripheral part of a substrate can be supported sufficiently while avoiding an interference with pins provided in a substrate stocking unit or an axial substrate carrier. SOLUTION: A substrate storing unit 1 has an opening 4 for inserting/taking out a substrate 2, and pins 5 for supporting substrates 2 arranged on the left and right, when viewed from the opening 4, respectively. A substrate carrier 10 for inserting/taking out a substrate 2 with respect to the substrate storing unit 1 has a substrate support arm 13 which can advance/retract and elevate/ lower relatively to the substrate storing unit 1. The arm 13 comprises a main arm 15 extending in the advancing/retracting direction of the arm and is insertable into the gap between the substrate support pins 5, and a plurality of sub-arms 16 disposed on the main arm 15 while being spaced apart in the advancing/retracting direction and projecting to the opposite sides thereof.