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发明名称
ALUMINUM NITRIDE HEATER
摘要
申请公布号
HK1017564(A1)
申请公布日期
2003.05.16
申请号
HK19990102432
申请日期
1999.06.02
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
NATSUHARA, MASUHIRO;NAKATA, HIROHIKO;YUSHIO, YASUHISA
分类号
H05B3/20;H05B3/12;H05B3/14;H05B3/16;H05B3/26;(IPC1-7):H05B
主分类号
H05B3/20
代理机构
代理人
主权项
地址
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