MOLECULAR TRANSFER LITHOGRAPHY

摘要

A method for the fabrication of patterned devices in which a latent image is initially formed in a photosensitive material on a carrier and the exposed material containing the latent image is physically tranferred to a substrate before processing. Physical transfer is enhanced by the appropriate selcetion of coating surface properties and additional coating layers and by processing steps such as heating and UV exposure to promote adhesion to the substrate and detachment from the carrier.