| 摘要 |
<p>An anodic oxidizer which enables the uniform photoirradiation of a treatment part of a target substrate and the more uniform anodic oxidation in the plane of the target substrate, and an anodic oxidation method. The anodic oxidizer comprises a light-emitting lamp, target substrate holder provided at a position where emitted light reaches, cathode electrode provided on the way of the emitted light to reach the target substrate and having a conductor section which has an opening to pass light but not to transmit light, and an oscillation mechanism for periodically oscillating the spatial position of a cathode electrode, lamp, or target substrate holder. With a rough spatial relationship maintained among three of the lamp, cathode electrode, and target substrate holder, the spatial position of at least one of them is periodically oscillated. Thus, the shadow of the cathode electrode is dispersed with time.</p> |
