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发明名称
GASVERTEILUNGSPLATTE MIT ZWEI GASKANÄLEN
摘要
申请公布号
DE69903466(T2)
申请公布日期
2003.05.15
申请号
DE19996003466T
申请日期
1999.06.08
申请人
APPLIED MATERIALS, INC.
发明人
MAJEWSKI, ROBERT;KAO, YEH-JEN;WANG, KUN
分类号
C23C16/44;C23C16/455;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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