VOLTAGE ACQUISITION WITH OPEN-LOOP CHARGED-PARTICLE-BEAM PROBE SYSTEM

摘要

Methods and apparatus, including computer program products, implementing and using techniques for voltage acquisition with an open-loop charged-particle-beam probe system. In general, in one aspect, the invention provides a method for open-loop waveform acquisition. The method includes acquiring an S-curve of an acquisition loop 408 of an electron-beam probe system 400. The S-curve represents a response of the acquisition loop to changes of potential differences between the acquisition loop and a device under test 426. The method includes calibrating the acquisition loop to obtain a linear region in the acquired S-curve and using the linear portion of the acquired S-curve to calculate voltage Vout at a probe point of the device under test.