Arrangement for processing substrate with laser radiation has rotary mirror, focusing lenses, collimation lenses, input lens arrangements with lens holders pre-adjusted to different focal lengths

摘要

The arrangement has a rotary mirror, adjacent focusing lenses and collimation lenses. At least two input lens arrangements containing at least two lenses in series are associated with lens holders pre-adjusted to different focal lengths in which they can be set to defined different distances from the collimation lens arrangement in the beam path or removed from the beam path to change the size of the focal spot range of the focusing lenses. The arrangement has a rotary mirror (16), adjacent focusing lenses (24) and collimation lenses (18). At least two input lens arrangements (14,14') containing at least two lenses in series are associated with lens holders pre-adjusted to different focal lengths in which they can be set to defined different distances from the collimation lens arrangement in the beam path or removed from the beam path to change the size of the focal spot range of the focusing lenses.