| 摘要 |
PROBLEM TO BE SOLVED: To provide a positive photosensitive composition excellent in edge roughness and producing no scum. SOLUTION: The positive photosensitive composition is characterized in containing (A) a specified sulfonium salt compound which generates an acid by irradiation of active rays or radiation and (B) a resin which has a monocyclic or polycyclic alicyclic hydrocarbon structure and which is decomposed by the effect of an acid to increase the solubility in an alkali developing solution. |
