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经营范围
发明名称
Polishing apparatus
摘要
申请公布号
EP1038635(A3)
申请公布日期
2003.05.14
申请号
EP20000302005
申请日期
2000.03.13
申请人
APPLIED MATERIALS, INC.
发明人
HOEY, GEE;BIRANG, MANOOCHER;BENNETT, DOYLE E.
分类号
B24B37/04;B24B53/007;H01L21/304;(IPC1-7):B24B37/04;H01L21/306
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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