发明名称 ALIGNMENT BEAM DEVICE HAVING AUTO ADJUSTMENT UNIT
摘要 PURPOSE: An alignment beam device having an auto adjustment unit is provided to be capable of automatically controlling the position of a laser and constantly locating a new laser at the same position after replacement. CONSTITUTION: An alignment beam device is provided with a laser(10) for generating the beam for alignment, an alignment part(50) for controlling the position of the laser(10), and a support part(40) for supporting the laser(10) by using the elastic force caused by the motion of the laser(10). The alignment part(50) further includes a motor for generating driving force, a driving shaft driven by the motor, a plate installed at the driving shaft, and a measurement part for measuring the coordinate of the plate. Preferably, a plurality of alignment parts are installed at the alignment beam device for shifting the laser(10) horizontally and vertically.
申请公布号 KR20030037612(A) 申请公布日期 2003.05.14
申请号 KR20010069147 申请日期 2001.11.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOO, JIN HYEOK
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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