Gas flow micro-system and specially designed housing for use of medical equipment for respiratory control

摘要

t is an object of the present patent to provide a gas system for medical applications, composed of a silicon sensor (12), an electronic circuit for readout and power supply of the sensor and a sensor housing. The silicon sensor is a thermal device,composed of a heater (3) and two series of the thermocouples (4,5) on both sides of the heater. The heater and the hot contacts (6) of the thermocouples lie on a porous silicon layer (2), locally formed on the silicon substrate (1) by electrochemical dissolution of bulk silicon. The cold contacts (7) lie on bulk silicon. The electronic circuit supplies a power to the heater and amplifies the sensor output. The housing of the sensor is composed of a main tube (9) with an internal bypass (10) inwhich the sensor device is fixed. The bypass tube is parallel to the direction of flow in the main. tube. The system is appropriate for respiratory control in medical applications.