| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of properly preventing the sticking of a movable electrode in a capacity-type sensor as a micro- structure provided with a fixed electrode and the movable electrode on a base. SOLUTION: This method comprises a process for forming a groove 15 defining the movable electrode 16, on a SOI base 10 from its one face side, a process for forming a resist member 20 as a coating member composed of a supporting part 21 packed in the groove 15 and having a function for supporting the movable electrode 16, and a protective part 22 covering one face of the base 10 and having a function for protecting the same, onto one face of the base 10, and a process for eliminating the protective part 22 of the resist member 20 by a wet process and the like in a state of keeping the supporting part 21 as it is. |
