发明名称 |
Method of making mosaic array of thin semiconductor material of large substrates |
摘要 |
A method for making an array of thin single-crystal substrates on a handle substrate comprising the steps: attaching a plurality of single-crystal substrates to a face of a support wafer; polishing said plurality of attached single-crystal substrates so that said single-crystal substrates surfaces are coplanar on said support surface and to a selected surface roughness; implanting a hydrogen to a selected depth into said attached single-crystal substrates; bonding said polished and hydrogen implanted attached single-crystal substrates to a first handle substrate; and splitting said polished and hydrogen implanted attached single-crystal substrates at said selected depth thereby forming an array of thin single-crystal substrates on said first handle substrate and a support wafer having a remaining portion of said attached single-crystal substrates.
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申请公布号 |
US6562127(B1) |
申请公布日期 |
2003.05.13 |
申请号 |
US20020046534 |
申请日期 |
2002.01.16 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
KUD FRANCIS;HOBART KARL;SPENCER MIKE |
分类号 |
C30B33/00;C30B33/06;(IPC1-7):C30B2/02;C30B25/04 |
主分类号 |
C30B33/00 |
代理机构 |
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