Liquid-cooled heat sink and manufacturing method thereof

摘要

A heat sink is obtained that has high thermal conductivity as well as satisfactory moldability and corrosion resistance by using a malleable material made of aluminum or aluminum alloy. Liquid cooled heat sink 11 has a passage 23 in which coolant is able to pass, and is joined to a ceramic substrate. A plurality of through holes 12 extending from one end to the other end are formed by a plurality of dividing walls 13 through 15 in flat casing 12 of which both ends are open, and notches 16 are formed on one or both ends of the plurality of dividing walls. Corrugated fins 17 are respectively inserted into each of the plurality of through holes, and each through hole is demarcated into a plurality of slots 12b extending from one end to the other end of the casing by these fins. Both ends of the casing are closed by a pair of covers 18 and 19, and coolant inlet 18a and outlet 18b are formed in the covers. The above passage is formed by communication of the notches and slots, and the above inlet and outlet are positioned on both ends of the passage.