PIEZOELECTRIC MEMBRANE RESONATOR, FILTER AND MANUFACTURING METHOD OF PIEZOELECTRIC MEMBRANE RESONATOR

摘要

PURPOSE: A piezoelectric membrane resonator, a filter and a manufacturing method for the piezoelectric membrane resonator are provided to be capable of considerably reducing the size of the piezoelectric membrane resonator and improving the resonance characteristics of the piezoelectric membrane resonator. CONSTITUTION: A piezoelectric membrane resonator(100) is provided with a silicon substrate(110) and a stacked resonating body(120) located at the upper portion of the silicon substrate. At this time, the stacked resonating body includes the first electrode layer(121), the second electrode layer(122) formed at the upper portion of the first electrode layer, and a piezoelectric layer(123) located between the first and second electrode layer. At the time, the silicon substrate has the first and second surface(111,112).