| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic bearing motor and an excimer laser apparatus using the motor which can eliminate an axial electromagnetic bearing, have inexpensive and simple structure and enhance rigidity in the shaft direction. SOLUTION: In the electromagnetic bearing motor provided with a motor 50 for rotatably driving a rotational element 10 and a plurality of active radial electromagnetic bearings 30, 40 for rotatably supporting the rotational element 10, an electromagnet target 30e of the radial electromagnetic bearing 30 is disposed and shifted relative to an electromagnet 30b in the shaft direction, shaft force F1 is generated, an electromagnet target 40e of the other radial electromagnetic bearing 40 is disposed and shifted relative to an electromagnet 40b in the direction opposite to that of the shifted electromagnet target 30e of the radial bearing 30, and shaft force F2 opposite to the shaft force F1 is generated. |
